OAI 0659-0004-01 – Advanced UV Light and Energy Meter for Wafer Steppers

OAI 0659-0004-01 – Advanced UV Light and Energy Meter for Wafer Steppers

• The OAI Model 659 UV Light and Energy Meter is a precision-calibrated tool engineered for high-accuracy monitoring and control of UV exposure in photolithography processes across the Semiconductor, MEMS, Wafer Packaging, and Wafer Bumping industries. With over 45 years of expertise, OAI delivers trusted UV metrology solutions backed by NIST-traceable standards and world-class calibration facilities.

 

• The Model 659 is specifically designed for use with all wafer steppers, including high-intensity models, providing unmatched performance in high-demand environments. This state-of-the-art analyzer offers real-time data acquisition, advanced averaging (up to 400 exposure readings), and seamless Ethernet and USB connectivity for rapid download and analysis.

 

• Key technical features include an intensity measurement range up to 7,500 mW/cm² and probe options across 365nm, 400nm, 420nm, and 436nm wavelengths, making it adaptable to diverse process requirements. Whether you need consistent dose monitoring, exposure uniformity, or repeatable control over stepper calibration, the OAI 659 delivers precise, reliable, and repeatable results—every time.

 

   Key Features & Benefits:

• Precision UV exposure analyzer for wafer stepper calibration

• Compatible with all wafer steppers, including high-intensity systems

• Ethernet & USB interfaces for fast data transfer and analysis

• Averages up to 400 exposure readings for process consistency

• High measurement range: up to 7,500 mW/cm²

• Available probes: 365nm, 400nm, 420nm, 436nm

• NIST-traceable calibration for maximum accuracy & compliance

• Backed by OAI’s certified calibration lab

   Ideal Applications:

• Semiconductor fabrication

• MEMS production

• Wafer bumping and packaging

• UV photolithography calibration and monitoring

 

    Maximize process control, minimize defects, and ensure consistency with the OAI 0659-0004-01 UV Light & Energy        Meter—the trusted choice for photolithography professionals.